Study of tungsten sputtered films with low nitrogen content
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference7 articles.
1. A review of the present state of art in hard coatings grown from the vapor phase
2. Characterization of W-N Alloys Formed By Sputter Deposition
3. Composition and Structure Characterization of WNx Films Produced by RF Reactive Sputtering
4. High Rate Thick Film Growth
5. Properties of hard tungsten films prepared by sputtering
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2. Hard and tough nitrogen doped tungsten coatings deposited by HIPAC: Microstructure and mechanical properties;Journal of Alloys and Compounds;2021-09
3. Effects of the Nitrogen Flow Ratio and Substrate Bias on the Mechanical Properties of W–N and W–Si–N Films;Coatings;2020-12-18
4. Physical properties of W2N thin films deposited by reactive magnetron sputtering;Fourteenth International Conference on Correlation Optics;2020-02-06
5. Mechanical properties and oxidation behavior of W–Si–N coatings;Surface and Coatings Technology;2019-10
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