Aperture effect in plasma etching of deep silicon trenches
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference4 articles.
1. Reactive ion etching of deep trenches in silicon with CF2Cl2 and O2
2. Structural Effects on a Submicron Trench Process
3. Molecular Gas Dynamics;Bird,1976
4. Dynamics of Gas-Surface Scattering;Goodman,1976
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Monocrystalline Quartz ICP Etching: Road to High-Temperature Dry Etching;Plasma Chemistry and Plasma Processing;2019-09-05
2. Effect of collisions on the angular distribution of ions under plasmachemical etching;Plasma Physics Reports;2017-08
3. ViPER: simulation software for high aspect ratio plasma etching of silicon;Microsystem Technologies;2013-10-17
4. Black silicon method: X. A review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment;Journal of Micromechanics and Microengineering;2009-02-02
5. Integrated framework for the flux calculation of neutral species inside trenches and holes during plasma etching;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2006-11
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3