Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Cited by
2 articles.
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1. Chapter 1 Ion Implantation into Semiconductors: Historical Perspectives;Semiconductors and Semimetals;1997
2. Vacuum system design for ion implanters;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04