Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Cited by
7 articles.
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1. Ion sources for ion implantation and ion beam modification of materials (invited);Review of Scientific Instruments;1994-04
2. Ion Beams in Prospect;Ion Implantation Technology–92;1993
3. Freeman ion source: An overview (invited);Review of Scientific Instruments;1992-04
4. Wide beam ion optics of mass analyser for ion implanters;Vacuum;1992-04
5. Vacuum system design for ion implanters;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04