The pH-sensing properties of tantalum pentoxide films fabricated by metal organic low pressure chemical vapor deposition

Author:

Mikolajick T,Kühnhold R,Ryssel H

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Microstrutured solid-state ion-sensitive membranes by thermal oxidation of Ta;Gimmel;Sensors and Actuators B,1990

2. Reduced light sensibility in optimized Ta2O5-ISFET structures;Gimmel;Sensors and Actuators B,1991

3. Photoelectric effecs in Ta2O5–SiO2–Si structures;Voorthuyzen;Sensors and Actuators B,1990

4. T. Mikolajick, Feldeffekttransistoren zur pH-Wert-Messung und als Transducer für Biosensoren, Thesis, University of Erlangen Nuremberg, 1996.

5. Effect of oxide additions on the polymorphism of tantalum pentoxide, IV system of tantalum pentoxide–tantalum tungstate(VI);Roth;J. Solid State Chem.,1970

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