Miniaturized pH‐Sensitive Field‐Effect Capacitors with Ultrathin Ta <sub>2</sub> O <sub>5</sub> Films Prepared by Atomic Layer Deposition-Reference-Cited by-同舟云学术

Miniaturized pH‐Sensitive Field‐Effect Capacitors with Ultrathin Ta ₂ O ₅ Films Prepared by Atomic Layer Deposition

Published:2022-02-03 Issue:8 Volume:219 Page:2100660
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Physica Status Solidi (a)

Author:

Molinnus Denise¹²,Iken Heiko¹,Johnen Anna Lynn¹,Richstein Benjamin³,Hellmich Lena³,Poghossian Arshak⁴,Knoch Joachim³,Schöning Michael J.¹⁵^ORCID

Affiliation:

1. Institut of Nano- and Biotechnologies (INB) FH Aachen 52428 Jülich Germany

2. Department of Intensive Care Medicine and Intermediate Care Medical Faculty RWTH Aachen University 52074 Aachen Germany

3. Institute of Semiconductor Electronics RWTH Aachen University 52056 Aachen Germany

4. MicroNanoBio 40479 Düsseldorf Germany

5. Institute of Biological Information Processing (IBI-3) Forschungszentrum Jülich GmbH 52425 Jülich Germany

Funder

Deutsche Forschungsgemeinschaft

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssa.202100660

Reference63 articles.

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4. Na⁺-Implanted Membrane for a Capacitive Sodium Electrolyte-Insulator-Semiconductor Microsensors

5. The effect of the type of doping on the electrical characteristics of electrolyte–oxide–silicon sensors: pH sensing and polyelectrolyte adsorption

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