Microstructured solid-state ion-sensitive membranes by thermal oxidation of Ta-Reference-Cited by-同舟云学术

Microstructured solid-state ion-sensitive membranes by thermal oxidation of Ta

Published:1990-01 Issue:1-6 Volume:1 Page:345-349
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Gimmel P.,Schierbaum K.D.,Göpel W.,van den Vlekkert H.H.,de Rooij N.F.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Ionensensitiver Feldeffekttransistor mit Ta2O5-Schicht für den Einsatz bei pH-Messungen;Klein;VDI-Ber.,1984

2. The suitability of Ta2O5 as a solid state ion-sensitive membrane;Teravaninthorn;Jpn. J. Appl. Phys.,1987

3. Methods of ISFET fabrication;Matsuo;Sensors and Actuators,1982

4. J.A. Voorthuyzen, H. van Vossen and P. Bergveld, Preparation and evaluation of tantalum pentoxide films for ISFET application, Proc. Third Conf. Sensors and their Applications (Eurosensors), Cambridge, U.K., Sept. 22–24, 1987, pp. 33–34

5. ISFET based enzyme sensors;van der Schoot;Biosensors,1987

Cited by 39 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Atomic layer deposition of tantalum oxide thin films using the precursor tert -butylimido-tris-ethylmethylamido-tantalum and water: Process characteristics and film properties;Thin Solid Films;2017-04

2. Atomic Layer Deposition of Groups 4 and 5 Transition Metal Oxide Thin Films: Focus on Heteroleptic Precursors;Chemical Vapor Deposition;2014-07-20

3. Light-Immune pH Sensor with SiC-Based Electrolyte–Insulator–Semiconductor Structure;Applied Physics Express;2013-12-01

4. High-performance imido–amido precursor for the atomic layer deposition of Ta2O5;Semiconductor Science and Technology;2012-06-22

5. Using of Ti/Co3O4/PbO2/(SnO2+Sb2O3) modified electrode as indicator electrode in potentiometric and conductometric titration in aqueous solution;Journal of Electroanalytical Chemistry;2012-01