Calculation of intrinsic stress by creep deformation of an Si substrate on chemical vapor deposited diamond films

Author:

Kim J.G.,Yu Jin,Cho D.H.,Baik Y.J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Comparative analysis of working gas composition impact on diamond films microstructure;Surfaces and Interfaces;2023-04

2. Properties of ultrananocrystalline diamond grown under different deposition conditions;8th International Congress on Energy Fluxes and Radiation Effects;2022-11-14

3. Nanocrystalline CVD diamond coatings for drilling of WC-Co parts;International Journal of Refractory Metals and Hard Materials;2011-09

4. An advanced method for measuring the residual stress of deposited film utilizing laser spallation technique;Science and Technology of Advanced Materials;2006-01

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