Author:
Gaydaychuk A.,Linnik S.,Mitulinsky A.,Zenkin S.
Abstract
The influence of CH4 and N2 concentration in CH4/H2/N2gas mixture on microstructure and mechanical properties of diamond films is investigated. Nitrogen addition to the gas mixture up to 18.5 vol. % does not significantly affect the structure of the coating. In the entire range of gas concentrations, coating structure is represented by a set of dendrites consisting of diamond crystallites of various sizes, as well as non-diamond carbon. It is shown that CH4 has a greater effect on the coating hardness and Young's modulus. Besides, it has been found that nitrogen-doped diamond coatings have a higher level of tensile residual stress. With a decrease in coating thickness or nitrogen concentration in the gas mixture, this difference decreases.