Strain in CVD diamond films: effects of deposition variables
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Proc. 2nd Int. Symp. on Diamond Films;Yoder,1991
2. Proc. 2nd Int. Conf. on New Diamond Science and Technology;Reineck,1991
3. Characterization of diamond films by Raman spectroscopy
4. Measurement of crystalline strain and orientation in diamond films grown by chemical vapor deposition
5. Intrinsic stress in diamond films prepared by microwave plasma CVD
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