Influence of an ammonia activation prior to the PECVD SiN deposition on the solar cell performance-Reference-Cited by-同舟云学术

Influence of an ammonia activation prior to the PECVD SiN deposition on the solar cell performance

Published:2003-02 Issue:3-4 Volume:75 Page:357-362
ISSN:0927-0248
Container-title:Solar Energy Materials and Solar Cells
language:en
Short-container-title:Solar Energy Materials and Solar Cells

Author:

Hauser Alexander,Spiegel Markus,Fath Peter,Bucher Ernst

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference7 articles.

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3. Physics of Radiation Effects in Crystals;Guseva,1986

4. M. Bruel, B. Aspar, B. Charlet, C. Maleville, T. Poumeyrol, A. Soubie, A.J. Auberton-Herve, J.M. Lamure, T. Barge, F. Metral, S. Trucchi, “Smart cut”: a promising new SOI material technology, IEEE International SOI Conference Proceedings, New York, USA, 1995.

5. Orientation dependence of blistering in H-implanted Si;Zheng;J Appl Phys,2000

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