Interplay of voltage and temperature acceleration of oxide breakdown for ultra-thin gate oxides

Author:

Wu E,Suñé J,Lai W,Nowak E,McKenna J,Vayshenker A,Harmon D

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference51 articles.

1. Voltage-dependent voltage acceleration of oxide breakdown for ultra-thin oxides;Wu,2000

2. Breakdown measurements of ultra-thin SiO2 at low voltage;Stathis,2000

3. Semiconductor science technology, gate oxide reliability projection to the sub-2 nm regime;Weir;Semicond. Sci. Technol.,2000

4. Field acceleration for oxide breakdown—Can an accurate anode hole injection model resolve the E vs. 1/E controversy?;Alam,2000

5. A new quantitative hydrogen-based model for ultra-thin oxide breakdown;Suñé,2001

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