A metal lift-off process through hyperbolic undercut of laser heat-mode lithography-Reference-Cited by-同舟云学术

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A metal lift-off process through hyperbolic undercut of laser heat-mode lithography

Published:2020-04 Issue: Volume:264 Page:127344
ISSN:0167-577X
Container-title:Materials Letters
language:en
Short-container-title:Materials Letters

Author:

Wang Zhengwei,Zhang Kui,Chen Guodong,Zhu Zhendong,Wang Yang,Wei Jingsong

Funder

National Natural Science Foundation of China

Strategic High-Tech Innovation Fund of Chinese Academy of Sciences

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference11 articles.

1. Nanoimprint methods for the fabrication of macroscopic plasmonically active metal nanostructures

2. Thick film patterning by lift-off process using double-coated single photoresists

3. High aspect ratio pattern collapse of polymeric UV-nano-imprint molds due to cleaning

4. Mechanism of Resist Pattern Collapse during Development Process

5. Mixture of ZEP and PMMA with varying ratios for tunable sensitivity as a lift-off resist with controllable undercut

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1. 基于相变薄膜高分辨激光直写光刻研究进展（特邀）;Chinese Journal of Lasers;2024

2. Direct Laser Writing Dry Lithography of High‐Resolution Micro‐/Nanostructures in AgSb₄Te Thin Film for Tunable Perfect Absorber;physica status solidi (RRL) – Rapid Research Letters;2023-12-24

3. NSbTe heat-mode resist possessing both positive and negative lithographic characteristics;Materials Letters;2022-10

4. Electrochemical Strategy for High‐Resolution Nanostructures in Laser‐Heat‐Mode Resist Toward Next Generation Diffractive Optical Elements;Small;2022-03-23

5. Investigation of etching selectivity and microstructure of Ag-doped Sb2Te thin film for dry lithography;Semiconductor Science and Technology;2022-01-20

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