Effect of substrate temperature on HWCVD deposited a-SiC:H film
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference18 articles.
1. The analysis of carbon bonding environment in HWCVD deposited a-SiC:H films by XPS and Raman spectroscopy
2. Influence of process pressure on HW-CVD deposited a-SiC:H films
3. Microscopic properties of H2 diluted HWCVD deposited a-SiC:H film
4. Time resolved photoluminescence of hydrogenated amorphous silicon carbon thin films deposited by HWCVD
5. Human serum albumin (HSA) adsorption onto a-SiC:H thin films deposited by hot wire chemical vapor deposition
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