Numerical simulation of the characteristics of the different metallic species falling on the growing film in d.c. magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference25 articles.
1. Thermalization of sputtered atoms
2. Monte Carlo simulation of a control for cathodic sputtering
3. The thermalization of energetic atoms during the sputtering process
4. Calculations of thermalization during the sputter deposition process
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