High rate deposition and electron beam recrystallization of silicon films for solar cells
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Preparation of polycrystalline silicon coatings from trichlorosilane
2. Conference Record of the 26th IEEE Photovoltaic Specialists Conference, Anaheim, CA, USA, 29 September–3 October 1997;Rostalsky,1997
3. A line beam electron gun for rapid thermal processing
4. Correlations between plasma parameters and the deposition of microcrystalline silicon films by plasma of argon and hydrogen
5. Proceedings of the 2nd EC Photovoltaic Solar Energy Conference, Berlin, Germany;Plättner,1979
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Evolution of a-Si:H to nc-Si:H transition of hydrogenated silicon films deposited by trichlorosilane using principle component analysis of optical emission spectroscopy;Materials Chemistry and Physics;2020-01
2. Si NW network by Ag nanoparticle assisted etching and TiO2/Si NWs as photodetector;Electronic Materials Letters;2015-03
3. Preparation and properties of polycrystalline silicon seed layers on graphite substrate;Journal of Semiconductors;2012-11
4. Influence of the energy density on the structure and morphology of polycrystalline silicon films treated with electron beam;Materials Science and Engineering: B;2007-01
5. Surface morphology and impurity distribution of electron beam recrystallized silicon films on low cost substrates for solar cell absorber;Rare Metals;2006-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3