Composition control of r.f.-sputtered Ti50Ni40Cu10 thin films using optical emission spectroscopy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Elevation of premartensitic transformation temperature by (Ni+Cu)2Ti precipitation in sputtered Ni(1−x)TiCu(x) thin films
2. MRS Symp. Proc.;Chang,1990
3. Glow Discharge Optical Spectroscopy for Monitoring Sputter Deposited Film Thickness
4. Spectroscopic diagnostics of CF4‐O2 plasmas during Si and SiO2 etching processes
5. Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density
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