Author:
Geisler M.,Braatz Ch.,Bruch J.,Kastner A.,Kress M.,Ruske M.,Willms T.,Zmelty A.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. TwinMag TM II: attempts to improve an excellent sputter tool
2. A. Boozenny, J. Hoog, Patent WO 91/07521, 1990
3. Reactive sputtering of dielectric layers on large scale substrates using an AC twin magnetron cathode
4. S. Schiller, K. Goedicke, V. Kirchhoff, T. Kopte, Soc. Vac. Coaters, 38th Annual and Technical Conference Proceedings, Chicago, 1995, p. 293
5. Properties of Si3N4-Layers Deposited by Medium Frequency Twin Magnetron Sputtering
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