High temperature materials for thin-film thermocouples on silicon wafers-Reference-Cited by-同舟云学术

High temperature materials for thin-film thermocouples on silicon wafers

Published:2000-11 Issue:1-2 Volume:376 Page:32-37
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Kreider Kenneth G,Gillen Greg

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. MRS Proceedings Vol. 525;Vandanabeele,1998

2. MRS Proceedings Vol. 525;Kreider,1998

3. Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers

4. 6th International Symposium on Temperature and Thermal Measurements in Industry, TEMPMEKO ’96 Turin, Italy, September 10–12;Burns,1996

5. 7th International Symposium on Temperature and Thermal Measurements in Industry and Science TEMPMECO ’99, Delft, Netherlands, June 1–3;Kreider,1999

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