Study of the chemical and structural organization of SIPOS films at the nanometer scale by TEM–EELS and XPS
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference28 articles.
1. Highly reliable high-voltage transistors by use of the SIPOS process
2. High-voltage planar devices using field plate and semi-resistive layers
3. The role of hydrogen in the deposition, composition, and structure of semi‐insulating polycrystalline silicon films
4. AES and XPS Studies of Semi‐Insulating Polycrystalline Silicon (SIPOS) Layers
5. Physical properties of semi‐insulating polycrystalline silicon. I. Structure, electronic properties, and electrical conductivity
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