Growth of Ge on silicon-on-insulator wafer by plasma enhanced chemical vapor deposition and fabrication of microline photodetector using the Ge layer
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Published:2024-04
Issue:
Volume:302
Page:117242
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ISSN:0921-5107
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Container-title:Materials Science and Engineering: B
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language:en
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Short-container-title:Materials Science and Engineering: B
Author:
Aggarwal Vishal Kumar,
Sengupta Subhamita,
Dey Amaresh,
Ghatak Ankita,
Ghosh Barnali,
Bysakh Sandip,
Singha Achintya,
Das Debajyoti,
Raychaudhuri A.K.ORCID