Enabling bottom-up nanoelectronics fabrication by selective sol–gel dielectric-on-dielectric deposition
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference55 articles.
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1. Dielectric SiO2 Sol-Gel Coatings for Microelectronics;Lecture Notes in Networks and Systems;2024
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