Impact-energy dependence of atomic mixing and selective sputtering of light impurities in cesium-bombarded silicon-Reference-Cited by-同舟云学术

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Impact-energy dependence of atomic mixing and selective sputtering of light impurities in cesium-bombarded silicon

Published:1983-05 Issue: Volume:209-210 Page:191-195
ISSN:0167-5087
Container-title:Nuclear Instruments and Methods in Physics Research
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research

Author:

Wittmaack K.

Publisher

Elsevier BV

Subject

General Engineering

Reference11 articles.

1. Assessment of the extent of atomic mixing from sputtering experiments

2. Implications in the use of secondary ion mass spectrometry to investigate impurity concentration profiles in solids

3. Implications in the use of sputtering for layer removal: the system Au on Si

4. Proc. 8th Int. Congr. X-ray optics and microanalysis;Limoge,1980

5. Anomalous sputter yields due to cascade mixing

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