Author:
Baborowski J.,Pezous A.,Spinola Durante G.,Jose James R.,Ziltener R.,Muller C.,Dubois M.-A.
Reference4 articles.
1. Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators;Candler;J.Micromech. Systems,2006
2. Piezoelectrically Activated Si Resonators;Baborowski,2007
3. Piezotransduced Single-Crystal Silicon BAW Resonators;Jaakkola,2007
4. Chip-level vacuum packaging of micromachines using nanogetters and glass-frit bonding;Sparks;IEEE Trans. Adv.Packag.,2003
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