Author:
Senzaki J,Fukuda K,Imai S,Tanaka Y,Kobayashi N,Tanoue H,Okushi H,Arai K
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference11 articles.
1. R. Patel, V. Khemka, N. Ramungul, T.P. Chow, M. Ghezzo, J. Kretchmer, Proc. of 1998 Int. Symp. Power Semiconductor Devices and Ics, p. 387.
2. R.K. Chilukuri, P.M. Shenoy, B.J. Baliga, Proc. Int. Symp. Power Semiconductor Devices and Ics, p. 115.
3. Significantly improved performance of MOSFETs on silicon carbide using the 15R-SiC polytype
4. Hot-Implantation of Phosphorus Ions into 6H-SiC
5. Nitrogen Ion Implantation into α-SiC Epitaxial Layers
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11 articles.
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