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Induced stresses and structural changes in silicon wafers as a result of laser micro-machining

  • Published:2002-02 Issue:3-4 Volume:187 Page:291-296
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Amer Maher S,Dosser Larry,LeClair Steven,Maguire John F

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

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2. Nanosecond Laser Induced Surface Structuring of Cadmium after Ablation in Air and Propanol Ambient;International Journal of Molecular Sciences;2022-10-22

3. Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser;Materials;2022-07-14

4. Non-traditional machining techniques for silicon wafers;The International Journal of Advanced Manufacturing Technology;2022-05-25

5. Surface modification of single-crystal silicon by hybrid laser treatment;13th International Photonics and OptoElectronics Meetings (POEM 2021);2022-01-21
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