Author:
Dauer S.,Ehlert A.,Büttgenbach S.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Fast three-dimensional laser micromachining of silicon for microsystems;Müllenborn;Sensors and Actuators A,1996
2. On the response-time behaviour of laser micromachined NiTi shape memory actuators;Rohde;Sensors and Actuators A,1997
3. G. Chryssolouris, Laser Machining, Springer, Berlin, 1991.
4. J. Powell, CO2 Laser Cutting, Springer, Berlin, 1993.
5. W. Koechner, Solid-State Laser Engineering, Springer, Berlin, 1996.
Cited by
22 articles.
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