Author:
Müllenborn M.,Dirac H.,Petersen J.W.,Bouwstra S.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Stereo laser micromachining;Bloomstein;Appl. Phys. Lett.,1992
2. Laser deposition and etching of three-dimensional microstructures;Bloomstein,1991
3. Three-dimensional nanostructures by direct laser etching;Müllenborn;Appl. Surf Sci.,1995
4. Rapid direct writing of high-aspect ratio trenches in silicon;Treyz;J. Vac. Sci. Technol. B,1988
5. Silicon nanostructures produced by laser direct etching;Müllenborn;Appl. Phys. Lett.,1995
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