Depth profiling of electrically non-conductive layered samples by RF-GDOES and HFM plasma SNMS-Reference-Cited by-同舟云学术

Depth profiling of electrically non-conductive layered samples by RF-GDOES and HFM plasma SNMS

Published:2001-07 Issue:1-4 Volume:179 Page:30-37
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Hodoroaba Vasile-Dan,Unger Wolfgang E.S,Jenett Holger,Hoffmann Volker,Hagenhoff Birgit,Kayser Sven,Wetzig Klaus

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference19 articles.

1. Applicability of a radiofrequency powered glow discharge for the direct solids analysis of non-conducting materials by atomic emission spectrometry

2. High-resolution sputter depth profiling with a low pressure hf plasma

3. R. Jede, O. Ganschow, U. Kaiser, 1992, in: D. Briggs, M.P. Seah (Eds.), Practical Surface Analysis, Vol. 2, 2nd edition, Ion and Neutral Spectroscopy, Wiley, Chichester, (Chapter 8).

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