The effects of carbonized buffer layer on the growth of SiC on Si
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference15 articles.
1. Improved β‐SiC heteroepitaxial films using off‐axis Si substrates
2. Production of large‐area single‐crystal wafers of cubic SiC for semiconductor devices
3. High mobility β-SiC epilayer prepared by low-pressure rapid thermal chemical vapor deposition on a (100) silicon substrate
4. New susceptor arrangement for the epitaxial growth of β-SiC on silicon
5. Gas source molecular beam epitaxy of β-SiC on Si substrates
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Epitaxial growth of 3C-SiC (111) on Si via laser CVD carbonization;Journal of Asian Ceramic Societies;2019-06-19
2. From thin film to bulk 3C-SiC growth: Understanding the mechanism of defects reduction;Materials Science in Semiconductor Processing;2018-05
3. Structure of AuSi nanoparticles on Si(111) from reflection high-energy electron diffraction and scanning tunneling microscopy;The European Physical Journal D;2011-05-17
4. Thin crystalline 3C-SiC layer growth through carbonization of differently oriented Si substrates;Journal of Applied Physics;2007-07-15
5. Cubic-to-monoclinic phase transition during the epitaxial growth of crystalline Gd2O3 films on Ge(001) substrates;Applied Physics Letters;2007-05-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3