Author:
Xie Xinyun,Zhang Ninglin,Men Chuanling,Liu Weili,Lin Qing,An Zhenghua,Lin Chenglu
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference8 articles.
1. Intelligent Power IC with Partial SOI Structure
2. E. Arnod, H. Pein, S.P. Herko, Proceedings of the IEDM’94, 1994, p. 813.
3. Y.K. Leung, Y. Suzuki, K.E. Goodson, S.S. Wng, Proceedings of the Seventh ISPSD, 1993, p. 124.
4. Fabrication of buried layers of SiO2 and Si3N4 a using ion beam synthesis
5. Transmission electron microscopy and Auger electron spectroscopy of silicon‐on‐insulator structures prepared by high‐dose implantation of nitrogen
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献