Analysis of platelet distribution in H ion-implanted silicon
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference8 articles.
1. Silicon on insulator material technology
2. Application of hydrogen ion beams to Silicon On Insulator material technology
3. Beyond “Smart-Cut®” Recent Advances in Layer Transfer for Material Integration
4. Platelet defects in hydrogen implanted silicon
5. Defects in single-crystal silicon induced by hydrogenation
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1. Analysis of defects in low-temperature polycrystalline silicon thin films related to surface-enhanced Raman scattering;Japanese Journal of Applied Physics;2017-12-14
2. Evolution of implantation induced damage under further ion irradiation: Influence of damage type;Journal of Applied Physics;2009-04
3. Bioactivity of plasma implanted biomaterials;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-01
4. Direct determination of the initial thermal evolution behaviour of the platelet defects in hydrogen implanted silicon wafers;Materials Science and Technology;2005-06
5. Biomimetic growth of apatite on hydrogen-implanted silicon;BIOMATERIALS;2004
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