Deposition of InN thin films by radio frequency magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference10 articles.
1. GaN, AlN, and InN: A review
2. InGaN-Based Multi-Quantum-Well-Structure Laser Diodes
3. Shortest wavelength semiconductor laser diode
4. Electrical and Optical Properties of rf‐Sputtered GaN and InN
5. Mechanisms of reactive sputtering of indium I: Growth of InN in mixed Ar-N2 discharges
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1. Characterization of InN films prepared using magnetron sputtering at variable power;Materials Letters;2018-05
2. In-rich AlxIn1−xN grown by RF-sputtering on sapphire: from closely-packed columnar to high-surface quality compact layers;Journal of Physics D: Applied Physics;2017-01-11
3. Morphology and arrangement of InN nanocolumns deposited by radio-frequency sputtering: Effect of the buffer layer;Journal of Crystal Growth;2016-01
4. Effects of Nitrogen Flow Ratio on the Properties of Radiofrequency-Sputtered InGaN Films;Journal of Electronic Materials;2015-02-12
5. Growth of InGaN layers on (111) silicon substrates by reactive sputtering;Journal of Alloys and Compounds;2014-02
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