c-Axis oriented AlN films prepared on diamond film substrate by electron cyclotron resonance plasma-enhanced chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference15 articles.
1. Improvement of the Electrical Properties of the AlN/GaAs MIS System and Their Thermal Stability by GaAs Surface Stoichiometry Control
2. Charge trapping characteristics of the interface states in an AlN/GaAs metal‐insulator‐semiconductor structure
3. High power durability of diamond surface acoustic wave filter
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1. Fabrication of c‐axis–oriented AlN bulk ceramics using a rotating magnetic field;International Journal of Applied Ceramic Technology;2022-10-06
2. Fabrication of AlN Films by RF Magnetron Sputtering for Surface Acoustic Wave Applications;Ferroelectrics;2014-01-03
3. Effect of deposition temperature and quality of free-standing diamond substrates on the properties of RF sputtering ZnO films;Diamond and Related Materials;2011-04
4. Layered SAW gas sensor based on CSA synthesized polyaniline nanofiber on AlN on 64° YX LiNbO3 for H2 sensing;Sensors and Actuators B: Chemical;2009-04
5. Influence of the texture on Raman and X-ray diffraction characteristics of polycrystalline AlN films;Thin Solid Films;2008-11
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