Fabrication of AlN Films by RF Magnetron Sputtering for Surface Acoustic Wave Applications
Author:
Publisher
Informa UK Limited
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://www.tandfonline.com/doi/pdf/10.1080/00150193.2013.837768
Reference18 articles.
1. Application of aluminum nitride films for electronic devices
2. Fabrication of aluminium nitride/diamond and gallium nitride/diamond SAW devices
3. Preparation of AlN and LiNbO3 thin films on diamond substrates by sputtering method
4. Surface acoustic wave devices based on nanocrystalline diamond and aluminium nitride
5. Epitaxial aluminum nitride films on sapphire formed by pulsed laser deposition
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3. Enhanced performance of AlN SAW devices with wave propagation along the 〈11−20〉 direction on c-plane sapphire substrate;Journal of Physics D: Applied Physics;2019-03-19
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