X-ray study of the surface morphology of crystalline and amorphous tantalum peroxide thin films prepared by RF magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference13 articles.
1. Annealing ultra thin Ta2O5 films deposited on bare and nitrogen passivated Si(100)
2. Auger Electron Spectroscopy Quantitative Analysis of Interfacial $\bf SiO_{2}$ Layer
3. Interfacial silicon oxide formation during oxygen annealing of Ta[sub 2]O[sub 5] thin films on Si: Oxygen isotope labeling
4. Dependence of thin-oxide films quality on surface microroughness
5. Formation mechanism of interfacial Si–oxide layers during postannealing of Ta2O5/Si
Cited by 25 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of scattering loss on optimization of waveguide enhanced Raman spectroscopy;Journal of Lightwave Technology;2023
2. Investigation of thermally induced changes on structure, morphology and stoichiometry of sputter deposited titanium oxide thin films;Thin Solid Films;2022-12
3. Superior in vitro corrosion resistance of the novel amorphous Ta/TaxOy multilayer coatings on self-expanding nitinol stents;Surface and Coatings Technology;2022-09
4. Effect of annealing temperature on microstructure and mechanical response of sputter deposited Ti-Zr-Mo high temperature shape memory alloy thin films;Applied Surface Science Advances;2021-12
5. Effect of vertical deposition angle on structural and optical properties of tantalum oxide nano layers deposited by electron gun evaporation;Chinese Journal of Physics;2021-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3