Micro milling tool made of nano-polycrystalline diamond for precision cutting of SiC-Reference-Cited by-同舟云学术

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Micro milling tool made of nano-polycrystalline diamond for precision cutting of SiC

Published:2017 Issue:1 Volume:66 Page:93-96
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Suzuki Hirofumi,Okada Mutsumi,Asai Wataru,Sumiya Hitoshi,Harano Katsuko,Yamagata Yutaka,Miura Katsuhiro

Funder

Japan Society for the Promotion of Science

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference12 articles.

1. Ultra-precision Grinding;Brinksmeier;Annals of the CIRP,2010

2. Precision Grinding of Structured Ceramic Molds by Diamond Wheel Trued with Alloy Metal;Suzuki;Annals of the CIRP,2012

3. Effect of Atmospheric-Pressure Plasma Jet on Polycrystalline Diamond Micro-Milling of Silicon Carbide;Katahira;Annals of the CIRP,2015

4. A Study on Electro Thermal Response of SiC Power Module during High Temperature Operation;Funaki;IEICE Electronics Express,2008

5. Development of Micro Milling Tool Made of Single Crystalline Diamond for Ceramic Cutting;Suzuki;Annals of the CIRP,2013

Cited by 22 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modeling of surface evolution in plasma etching for SiC microgroove fabrication;Ceramics International;2024-09

2. Coating-assisted picosecond laser ablation for microstructure fabrication of SiC ceramics;Optics Express;2024-07-09

3. Machining Characteristics of Micro EDM of Silicon Carbide;Journal of the Korean Society for Precision Engineering;2024-02-01

4. Unveiling anisotropic behavior in 3C-SiC via in situ nano-scratching;Science China Materials;2023-10-12

5. Mechanisms of tool-workpiece interaction in ultraprecision diamond turning of single-crystal SiC for curved microstructures;International Journal of Machine Tools and Manufacture;2023-10

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