A study on the optimal fabrication method for micro-scale gyroscopes using a hybrid process consisting of electric discharge machining, chemical etching or micro-mechanical milling-Reference-Cited by-同舟云学术

A study on the optimal fabrication method for micro-scale gyroscopes using a hybrid process consisting of electric discharge machining, chemical etching or micro-mechanical milling

Published:2013 Issue:1 Volume:62 Page:183-186
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Fonda Peter,Nakamoto Kazuo,Heidari Amir,Yang Hsueh-An,Horsley David A.,Lin Liwei,Yamazaki Kazuo

Funder

DARPA MRIG

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference10 articles.

1. Micromachining 3D Hemispherical Features in Silicon Via Micro-EDM;Chan,2012

2. Design and Development of a Micro Polycrystalline Diamond Ball End Mill for Micro/Nano Freeform Machining of Hard and Brittle Materials;Cheng;Journal of Micromechanics and Microengineering,2009

3. Machining of Three-Dimensional Microstructures in Silicon by Electro-Discharge Machining;Reynaerts;Sensors and Actuators A,1998

4. A Study on the Elimination of Micro-Cracks in a Sparked Silicon Surface;Song;Sensors and Actuators A,2001

5. An Experimental Investigation into Micro Ball End-Milling of Silicon;Arif;Journal of Manufacturing Processes,2012

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