Design and simulation of dual-axis MEMS accelerometer
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference8 articles.
1. Taras Petruk, Vasyl Teslyuk, MykhayloMelnyk,“Optimization of the Accelerometer Design Using Ansys”, MEMSTECH 2016,20-24 April, 2016,Polyana-Svalyava (Zakarpattya), UKRAINE.
2. KeyaSanyal, KalyanBiswas,“Structural Design and Optimization of MEMS based Capacitive Accelerometer”, Devices for Integrated Circuit (DevIC), 23-24 March, 2017, Kalyani, India, 2017.
3. PharyanshuKachhawa, RamaKomaragiri,” Performance Optimization of MEMS Capacitive Accelerometer”, 2014 IEEE.
4. Zakriya Mohammed, Alabi Bojesomo, WaqasA.Gill, Ibrahim.M.Elfadel(Abe), Mahmoud Rasras “A Crab Leg Suspension Based Dual Axis MEMS Accelerometer with Low Cross Axis Sensitivity” Masdar Institute of Science and Technology Masdar City, IEEE 59th International Midwest Symposium on Circuits and Systems (MWSCAS), 2016.
5. A Sthuthi, G Nithya, V.S. Nagaraja, “Design, modeling, fabrication, packaging and characterization of MEMS screech sensor”,Materials Today: Proceedings,Elsevier, 2022.
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1. Design and Modeling of Differential Capacitive Hexagonal Beam Based MEMS Accelerometer;2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP);2024-06-02
2. Modeling, Simulation, and Optimization of Piezoelectrically Actuated Dual-Axis MEMS Accelerometer for Seismic Sensing;Journal of Vibration Engineering & Technologies;2023-10-31
3. Development of Dual Axis MEMS Accelerometer Based On SOI-MUMPs Using CoventorWare;2023 IEEE International Conference on Sensors and Nanotechnology (SENNANO);2023-09-26
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