Design and Modeling of Differential Capacitive Hexagonal Beam Based MEMS Accelerometer
Author:
Affiliation:
1. Indian Institute of Technology Hyderabad,Dept. of Mechanical and Aerospace Engineering,Kandi, Sangareddy,Telangana,India,502284
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx8/10613004/10613044/10613242.pdf?arnumber=10613242
Reference12 articles.
1. MEMS kapasitif ivmeölçer: Bir inceleme
2. Designing MEMS accelerometer for enhanced sensitivity and reduced cross-sensitivity in landslide monitoring
3. A vibrating beam MEMS accelerometer for gravity and seismic measurements
4. Design, modelling, and simulation analysis of a single axis MEMS-based capacitive accelerometer;Veena Rai;arXiv preprint,2021
5. Frequency characteristics and thermal compensation of MEMS devices based on geometric anti-spring
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