Design, modeling, fabrication, packaging and characterization of MEMS screech sensor-Reference-Cited by-同舟云学术

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Design, modeling, fabrication, packaging and characterization of MEMS screech sensor

Published:2022 Issue: Volume:59 Page:1132-1137
ISSN:2214-7853
Container-title:Materials Today: Proceedings
language:en
Short-container-title:Materials Today: Proceedings

Author:

Sthuthi A.,Nithya G.,Nagaraja Veda Sandeep

Funder

NITTE Meenakshi Institute of Technology

Publisher

Elsevier BV

Subject

General Medicine

Reference4 articles.

1. Combustion noise;Dowling;Proc. Combust. Instit.,2015

2. Louh Jules, Banger Vanves, Review on vibrational damping device for a combustion chamber, Patent No. 856,687, US 3601985, 1969.

3. The design and analysis of gas turbine;Vinod;J. Adv. Eng. Res. Stud.,2012

4. Design and modelling of silicon MEMS accelerometer;Hrairi;J. Eng. Syst. Modell. Simulat.,2013

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and simulation of dual-axis MEMS accelerometer;Materials Today: Proceedings;2023-06

2. Performance Analysis of Micro-Electro-Mechanical Systems Based Capacitive Accelerometer;2022 International Conference on Recent Trends in Microelectronics, Automation, Computing and Communications Systems (ICMACC);2022-12-28

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