Author:
Watanabe Hideo,Katoh Kazuhisa,Yasui Masaru
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Cited by
31 articles.
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1. Vibrational Spectroscopy of Carbon and Silicon Materials;Handbook of Vibrational Spectroscopy;2006-08-15
2. Synthesis of silicon oxynitride layers by dual ion-implantation and their annealing behaviour;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2003-12
3. Structural studies of 20 keV oxygen-implanted silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-08
4. Chapter 1 Silica, silicon nitride and oxynitride thin films;New Insulators, Devices and Radiation Effects;1999
5. Nitrogen in germanium;Journal of Applied Physics;1998-07