Author:
Wasa Kiyotaka,Hayakawa Shigeru
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Cited by
27 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Thin films for material engineering;Japanese Journal of Applied Physics;2016-06-09
2. Thin Films as Material Engineering;Journal of Superconductivity and Novel Magnetism;2015-01-22
3. High power impulse magnetron sputtering discharge;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2012-05
4. Functional Thin Films;Handbook of Sputtering Technology;2012
5. Sputtering Systems;Handbook of Sputtering Technology;2012