Author:
Sanz J.M,Clement M,Martínez-Duart J.M
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Effect of Ti deposition temperature on TiSix resistivity;Applied Physics Letters;1995-02-13
2. W nucleation on TiN from WF6 and SiH4;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-07