Contact for shallow junctions
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Thin Films—Interdiffusion and Reactions;Rosenberg,1978
2. Cross‐sectional transmission electron microscopy of silicon‐silicide interfaces
3. Epitaxial Growth of Nickel Silicide NiSi2on Silicon
4. Thin Films—Interdiffusion and Reactions;Tu,1978
5. Review of binary alloy formation by thin film interactions
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1. Core-Shell Effect on Nucleation and Growth of Epitaxial Silicide in Nanowire of Silicon;One-Dimensional Nanostructures;2013-01-25
2. Nucleation and growth of epitaxial silicide in silicon nanowires;Materials Science and Engineering: R: Reports;2010-11
3. Analytical studies of nickel silicide formation through a thin Ti layer;Applied Surface Science;1996-09
4. Phase separation and silicide formation in the films of Pd-W alloys on Si;Proceedings, annual meeting, Electron Microscopy Society of America;1990-08
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