Author:
Kominiak G.J.,Mattox D.M.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Proc. 6th Int. Vacuum Congr.;Hosokawa,1974
2. Plasma etching of thin metal and dielectric films;Bersin;J. Vac. Sci. Technol.,1976
3. Surface cleaning in thin film technology;Mattox;Sandia Lab. Rep. SAND74-0344,1975
Cited by
39 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Application of laser cleaning on AlMg4.5Mn0.4 sheets for adhesive bonding;International Journal of Adhesion and Adhesives;2022-06
2. Ion Plating;The Foundations of Vacuum Coating Technology;2018
3. Physical Sputtering and Sputter Deposition;The Foundations of Vacuum Coating Technology;2018
4. Plasmas and Plasma Enhanced CVD;The Foundations of Vacuum Coating Technology;2018
5. Surface Analysis of Titanium Cleaning and Activation Processes: Non-thermal Plasma Versus Other Techniques;Plasma Chemistry and Plasma Processing;2014-04-10