Sputtering-induced surface roughness of metallic thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference34 articles.
1. Sputtering by Particle Bombardment II;Carter,1983
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3. Evaluation of concentration-depth profiles by sputtering in SIMS and AES
4. The statistical sputtering contribution to resolution in concentration-depth profiles
5. On the development of increasing surface roughness during ion sputtering
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