Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Cited by
10 articles.
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1. Deposition Fundamentals and Properties of Metallic and Diffusion Barrier Films;Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices;1993
2. Strain gradients in Al‐2% Cu thin films;Journal of Applied Physics;1991-08-15
3. References;Thin Films by Chemical Vapour Deposition;1990
4. The current status of metallization in integrated circuit applications;Materials Science and Engineering: A;1989-08
5. Micrometallization Technologies;Reduced Thermal Processing for ULSI;1989