Author:
Nava F.,Mantovani S.,Pignatel G.,Queirolo G.,Celotti G.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Thin Films—Reactions and Diffusions, Silicide Formation;Tu,1978
2. Review of binary alloy formation by thin film interactions
3. Refractory silicides for integrated circuits
4. Reliability and Degradation: Devices, Circuits and Systems;Ottaviani,1981
5. Studies of the Ti‐W Metallization System on Si
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