Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Ion Beams with Applications to Ion Implantation;Wilson,1973
2. Formation of thin SiO2 films by high dose oxygen ion implantation into silicon and their investigation by IR techniques
3. Proc. Int. Conf. on Application of Ion Beams to Semiconductor Technology;Blamires,1967
4. European Conf. on Ion Implantation;Freeman,1970
5. Ion Implantation in Semiconductors,1971
Cited by
50 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献